The mp6 micropumps achieve a maximum flow rate of 7 ml/min and a pressure of 600 mbar at 100 Hz, 250 Vpp and SRS signal. Our mp6-AIR micropump achieves a flow rate of minimum 20 ml/min and a pressure of 100 mbar at 300 Hz, 250 Vpp and SRS signal. The flow rate of the pump is a linear dependency on the pressure. At 0 mbar pressure the maximum pump rate can be achieved and at the maximum pressure the flow rate is decreased to 0 ml/min. To achieve higher flow rates and higher pressure you would need a series connection to add up the pressure and a parallel connection to add up the volume flow.
This topic is discussed in the attached TechNote.